www.sensirion.com version 2 C february 2014 1 / 7 data s heet SFM3000 low pressure drop digital flow meter ? low pressure drop ? flow range: +/ - 200 slm (bidirectional) ? accuracy 1.5 % m.v. (typical) ? very fast update time (0.5ms) ? fully calibrated & temperature compensated ? zero offset, no drift product summar y the SFM3000 sensor is sensirions digital flow meter designed fo r high - volume applications. it measure s the flow rate of air , oxygen and other non - aggressive gases with superb accuracy. a special design of the flow channel results in the very low pressure drop through the flow body of the sensor making it extremely suitable for very demanding applications, such as medical ventilation and respira tory applications . the SFM3000 operates from a 5 v olt supply voltage and features a digital 2 - wire i 2 c interface . the measurement results are internally linearized and temperature compensated . th e outstanding performance of this sensor is based on sensirions patented cmosens ? sensor technology , which combines the sensor element, signal processing and digital calibration on a single microchip. the flow rate of the gas is measured by a thermal sensor element which assures very fast signal processing time and bi - directional measurement with best - in - class accuracy . the well - proven cmos technology is perfectly suited for high - quality mass production and is the ideal choice for demanding and cost - sensitive oem applications . applications ? medical ? process automation ? burner control ? fuel cell control ? spectroscopy ? environment monitoring ? laboratory oem options a variety of custom options can be implemented for high - volume oem applications (custom flow rates, calibration for other gases, different body form factor etc. ). contact us for more information. sensor chip the SFM3000 flow meter features a fifth - generation silicon sensor chip sf05. in addition to a thermal mass flow sensor element, the chip contains an amplifier, a/d converter, eeprom memory, digital signal processing circuitry, and interface. due to seamless integration of signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved. connection diagram SFM3000 with bidirectional digital communication (i 2 c bus) m i c r o c o n t r o l l e r ( m a s t e r ) s f m 3 0 0 0 ( s l a v e ) v d d g n d s d a s c l 5 v
www.sensirion.com version 2 C february 2014 2 / 7 1. sensor performanc e 1.1 physical specifications 1 parameter condition value unit flow ranges air /n 2 /o 2 - 200 +200 2 slm 3 update t ime 14 bit 0.5 ms max. typ. accuracy 4 , 5 , 6 , 7 span offset 2.5 0.1 1.5 0.05 % m.v. 8 slm repeatability 4,7 span offset 1 0. 05 0.5 0.0 2 % m.v. slm noise level 4,7 s pan offset 1 0.1 0.5 0.05 % m.v. slm accuracy shift due to temperature variation 9 span offset 0.75 0.0 0.25 0.0 % m.v./10c slm position sensitivity 10 non - horizontal position < 0.05 slm pressure drop @60slm @200slm < 100 / < 0.4 < 600 / < 2.4 pa / inh 2 o 1.2 media compatibility parameter value calibration 11 air, n 2 , o 2 media c ompatibility air, n 2 , o 2 , other non - aggressive gases wetted m aterials ppe+ps blend (noryl hn731se, medical grade: biocompatible; iso 10993 or usp class vi) , si, si 3 n 4 , sio x , gold, epoxy (fr04, fp4401) , , polyurethane, stainless steel (din 1.4301/aisi 304, annealed), rohs, reach, weee rohs, reach and weee compliant 1.3 a mbient conditions parameter condition value unit calibrated temperature range 15 - 95% rel. hum. (non cond.) - 20 + 85 c operating temperature range 15 - 95% rel. hum. (non cond.) - 40 + 85 c storage temperature 10 - 95% rel. hum. (non cond.) - 40 +85 c operating pressure range absolute 0.7 C 1.3 bar burst overpressure gauge > 1 bar 1 unless otherwise noted, all sensor specifications are valid at 25c with vdd = 5 v and absolute pressure = 966 mbar. 2 optiona l calibration up to 300 slm range is available for large volume projects 3 in standard liter per minute at 20c and 1013 mbar 4 w ith ideal inlet and outlet conditions, at vdd = 5v, 2 5 c, absolute pressure = 966 mbar 5 including offset, non - linearity, hysteresis 6 sensor position horizontal (see section 4.1 ) 7 span or offset value , whichever is larger 8 in % of me asured value (m.v.) = of rate = of reading 9 shift due to temperature variation compared to calibration temperature 10 see section 4.1 11 contact sensirion for information about other gases, wider calibrated temperature ranges and higher storage temperatures.
www.sensirion.com version 2 C february 2014 3 / 7 2. electrical specifications 2.1 electrical characteristics electrical properties condition value unit interface i 2 c default sensor address 64 (h4 0) soft r eset t ime 80 ms start - up time 12 max. 100 m s supply voltage (vdd) 5v +/ - 5% v communication level high low min. max. v 2.5 gnd vdd 1.1 power c onsumption < 50 mw electrical connector 2 mm pitch, 4 pins in a row output signal resolution 1 4 13 bit scale factor flow air, n2 o2 140 142.8 1/slm offset flow 32000 12 after 4.75v is reached 13 16 bit with t wo least significant bits a lways zero 2.2 pin layout and mechanical concept of the electrical connection the SFM3000 is designed for both connector attachment and through - hole technology hand - soldering to a pcb. 2.2.1 c onnector attachment the SFM3000 sensor s 4 - pin 2 mm pitch electrical connector is compatible with molex duraclik? socket ( molex product number: 502351 - 0400). for this type of connection please order the SFM3000 with a cap (according to the ordering information in chapter 5 ). diverse 4 - core flat ribbon cable s with crimp fittings can be us ed for electrical connection . 2.2.2 pcb soldering standard selective soldering systems may be used for soldering SFM3000 sensors. reflow soldering is not feasible and may damage the sensor. the sensor ports must be protected from solder splash and flux during soldering. the characteristics of selective soldering machines vary, so any soldering setup must be tested before production use. 2.3 conversion to physical values in order to obtain the measured flow in [slm] , the measured value needs to be converted using t he following formula: please note that the first measurement performed directly after chip initialization is not valid. positive f low direction (as marked on the sensor body)
www.sensirion.com version 2 C february 2014 4 / 7 3. mechanical specifications all dimensions are in millimeters (mm). 3.1 SFM3000 without cover (pcb mount version) 3.2 SFM3000 with cover if used with cover, sensor height is 34.4 mm instead of 33 mm. all the other dimensions remain the same 3.3 footprint please refer to the mask given below for reliable pcb attachment using the dedicated snap - in feet .
www.sensirion.com version 2 C february 2014 5 / 7 3.4 mechanical fitting fitting s of the SFM3000 sensor correspond to the international standard iso5356 - 1 :2004 . details about this type of connection can be found in the description of the standard. to minimize the risk of connectors being accidentally disconnected, latching connectors can be suggested . it is also possible to insert o - rings in the grooves and attach tubes with a n inner diameter of 23 mm to the SFM3000 . cross section of recommended o - ring 4. instructions for use 4.1 calibration orientation the sensors are calibrated horizontally as depicted in the following graph: 4.2 inlet flow condition s in order to provide good flow conditions, the inner diameter of the connecting tube has to be approximately the same as the inner diameter of the SFM3000 main flow channel . the inlet tube has to be straight and at least 10 cm in length. the SFM3000 is equipped with meshes on the in - and out lets of the flow channel to reduce turbulences and thus improve the stability . please refer to the application note inlet conditions for the SFM3000 mass flow meters for more information. 4.3 te mperature compensation the SFM3000 sensor features digital temperature compensation. the temperature is measured on the cmosens ? chip by an on - chip temperature sensor. this data is fed to a compensation circuit that is also integrated on the cmosens ? sensor chip. thus, n o external temperature compensation is necessary. 4.4 sensor handling the s fm3000 sensor is designed to be robust and shock resistant. nevertheless, the accuracy of the high - precision sfm300 0 can be degraded by rough handling. sensirion d oes not guarantee proper operation in case of improper handling. note: avoid applying any mechanical stress to the solder joints of the sensor during or as a result of pcb assembly. 4.5 esd the electronics of the SFM3000 sensor consist of a single automotive qualified chip. it complies with the following esd norms: - aec q 100 002 (4kv hbm ) - aec q 100 003 (200v mm) although the sensor complies with these norms, it does not mean the sensor is immune against esd. the sensor is ship ped in an antistatic tray to prev ent electrostatic discharge . to avoid damage to the sensor , ground yourself using a grounding strap or by touching a grounded object before touching the sensor . furthermore , store the parts in an antistatic package when not in use. 4.6 i 2 c interface and c ommunication due to i 2 c interface restrictions, the cable length from the sensor to the microprocessor is recommended to be as short as possible and certainly not above 30 cm. for wires longer than 10 cm it is mandatory to shield the sda and scl. in case d ata is read from the sensor, the first data byte of the transaction must always be acknowledged by the master. it must be possible to reset the sensor through a hard reset, i.e. powering off and on the sensor, in case the sensor freezes. i 2 c communication details are given in the application note i 2 c functional description for SFM3000 . d 1 = 19mm d 2 = 2mm
www.sensirion.com version 2 C february 2014 6 / 7 5. ordering information use the part names and product numbers shown in the table below when ordering SFM3000 sensors. for the latest product information and local distributors, visit www.sensirion.com . part name cap product number 1 - 100xxx - xx SFM3000 - 200 - c with 932 - 01 SFM3000 - 200 without 934 - 01 packaging units: 2 0 items/tray. every sensor is traceable by a unique serial number. revision history date author version changes july 2013 anb 1 first release february 2014 anb 2 updated material to noryl
www.sensirion.com version 2 C february 2014 7 / 7 important notices warning, personal injury do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). do not use this product for applications other than its intended and authorized use. before installing, handling, using or servicing this product, please consult the datasheet and application notes. failure to comply with these instructions could result in death or serious injury. if the buyer shall purchase or use sensirion products for any unintended or unauthorized application, buyer shall defend, indemnify and hold harmless sensirion and its officers, employees, subsid iaries, affiliates and distributors against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if sen sirion shall be allegedly negligent with respect to the design or the manufacture of the product. esd precautions the inherent design of this component causes it to be sensitive to electrostatic discharge (esd). to prevent esd - induced damage and/or degrada tion, take customary and statutory esd precautions when handling this product. warranty sensirion warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in sensirions published specifications of the product. within such period, if proven to be defective, sensirion shall repair and/or replace this product, in sensirions discretion, free of charge to the buyer, pro vided that: ? notice in writing describing the defects shall be given to sensirion within fourteen (14) days after their appearance; ? such defects shall be found, to sensirions reasonable satisfaction, to have arisen from sensirions faulty design, material , or workmanship; ? the defective product shall be returned to sensirions factory at the buyers expense; and ? the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period. this warranty does not apply to any equipment which has not been installed and used within the specifications recommended by sensirion for the intended and proper use of the equipment. except for the warranties expressly set forth herein, sensirion makes no warranties, either ex press or implied, with respect to the product. any and all warranties, including without limitation, warranties of merchantability or fitness for a particular purpose, are expressly excluded and declined. sensirion is only liable for defects of this produc t arising under the conditions of operation provided for in the datasheet and proper use of the goods. sensirion explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in accordance with th e technical specifications. sensirion does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. all oper ating parameters, including without limitation recommended parameters, must be validated for each customers applications by customers technical experts. recommended parameters can and do vary in different applications. sensirion reserves the right, witho ut further notice, (i) to change the product specifications and/or the information in this document and (ii) to improve reliability, functions and design of this product. copyright ? 2001 - 201 4 , sensirion. cmosens ? is a trademark of sensirion all rights reserved reach, rohs and weee statement the SFM3000 sensor complies with requirements of the following directives: ? eu directive 1907/2006/ec concerning registration, evaluation, authorization and restriction of chemicals (reach) ? eu directive 2002/96/ec on waste electrical and electronic equipment (weee), oj13.02.2003; esp. its article 6 (1) with annex ii. ? eu directive 2002/65/ec on the restriction of certain hazardous substances in electric and electronic equipment (rohs), oj01.0 1.2011 headquarters and subsidiaries sensirion ag laubisruetistr. 50 ch - 8712 staefa zh switzerland phone: +41 44 306 40 00 fax: +41 44 306 40 30 info@sensirion.com www.sensirion.com sensirion inc., usa phone: +1 805 409 4900 info_us@sensirion.com www.sensirion.com sensirion japan co. ltd. phone: +81 3 3444 4940 info@sensirion.co.jp www.sensirion.co.jp sensirion korea co. ltd. phone: +82 31 345 0031 3 info@sensirion.co.kr www.sensirion.co.kr sensirion china co. ltd. phone: +86 755 8252 1501 info@sensirion.com.cn www.sensirion.com .cn sensirion ag (germany) phone: +41 44 927 11 66 info@sensirion.com www.sensirion.com to find your local representative, please visit www.sensirion.com/contact
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